Tool #434  Evaporator Lesker Spectros

The Lesker Spectros is a load-locked e-beam evaporator dedicated for the microwave- and opto-process lines. The wafer holder can be tilted, rotated, and water cooled during the process.

Specifications:

Base pressure:
< 1x10^-7 mbar

Sources:
Al, Au, Pd, Ge, Ni, Pt, Ti, Ta

Wafer size:
Up to one 100mm wafer clamped to a 110mm x 110mm transfer plate

Funded by: Knut and Alice Wallenbergs foundation.