Tool #425 – Edwards 306 Evaporator. General purpose resistive evaporator, with the possibility to fit an angle evaporation stage on top. It is equipped with a 4-position resistive evaporation source, and the turbomolecular pumping system gives a base pressure of <5*10E-7 mbar, although this requires long pumping time. Sample size is maximum 50 mm with the tilt stage, but without tilt it is possible to fit up to 6” (150 mm) wafers. Materials permitted are Al, Au, Ag, Cr, Cu, Ge.