Picture of Mask aligner - Suss MJB3 UV 400 #2
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Mask aligner for UV photolithography - wavelenght: 400nm - mask size: 4 inch - material size: 3 inch.

UV-Intensity: 15 mW/cm2 , broadband emission constituting wavelengths 365mn(i-line) , 405nm(h-line), and 436nm(g-line).

Placement: Process lab 2

Funded by: Knut and Alice Wallenbergs foundation.

/John

Tool name:
Mask aligner - Suss MJB3 UV 400 #2
Area/room:
Processlab 2
Category:
Lithography
Manufacturer:
Karl Suss
Model:
MJB3
Tool rate:
C
Price/hour:
Low: 580 SEK
Medium: 1000 SEK
High: 1250 SEK

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