Picture of Spinner - Polos & hotplates - Unconventional resists
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Description

Placement: Process lab 1, nanolithography. This station is equipped with a Polos spinner and two BLE hotplates. It is intended for unconventional resists such as HSQ, BCB, SU-8 etc.

Details
Tool name:
Spinner - Polos & hotplates - Unconventional resists
Area/room:
Processlab 1
Category:
Lithography
Manufacturer:
Polos + BLE
Model:
Polos + Delta200_Hotplates
Tool rate:
A
Price/hour:
Low: 125 SEK
Medium: 250 SEK
High: 370 SEK
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