Picture of Spinner - Polos & hotplates - Unconventional resists
Current status:
WARNING
Book | Log| 
Show/Collapse all

Responsibles
Files
You must be logged in to view files.
Description

Placement: Process lab 1, nanolithography. This station is equipped with a Polos spinner and two BLE hotplates. It is intended for unconventional resists such as HSQ, BCB, SU-8 etc.

Details
Tool name:
Spinner - Polos & hotplates - Unconventional resists
Area/room:
Processlab 1
Category:
Lithography
Manufacturer:
Polos + BLE
Model:
Polos + Delta200_Hotplates
Tool rate:
A
Price/hour:
Low: 125 SEK
Medium: 250 SEK
High: 370 SEK
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
You must be logged in to view tool modes.