The Si-thourgh infrared Microscope is a simple transmission micrscope which allow inspection of non-transparent samples.
The system uses a propetary technology which allow measurements using Si cameras and special illumination. The tool is equipped with different objective with different penetration depth.
Typical application of the Si-Through-HR microscope :
- Evaluation of bonding alignment, including the analysis of alignment marks among circuits that are thinly bonded, and the alignment of wafers that are bonded together.
- Inspection of strctures exposed both on top and bottom of wafers