Coherent (former Lambda-Physik) excimer laser working with KrF gsa mixture and regular resonator optics, which gives a regular divergence beam. Wavelength 248 nm, maximum pulse energy 850 mJ, max repetition rate 10 Hz. Used for pulsed laser deposition (PLD) in tools #11411 (Calas), #11451 (PLD-TSST) and #11413 (Carbon).