Surface profiler with a 5 micron diamond tip stylus with 60 degree cone angle

Variable stylus force from 0.03 mg to 15 mg

200 mm motorized sample chuck with vacuum

Measuring range from 5 nm to 1200 µm step height

55 mm scan length, longer with stitching

2D and 3D measurement capability

Side view optics with 5 MP colour camera, 4x digital zoom and Keystone correction