Maximum sample thickness: 21mm

Max. allowed trench depth:100 micron 

Surface profiler with a 2.5 micron wide stylus tip with fixed stylus force.

Scan length: 10 mm (Right to left orientation)

Stylus force: 2.7mg (Manually adjustable force)

Stylus force range: 1.0-99.9mg

Stylus resolution: 0.1mg

Stylus cone angle: 60 deg.