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Furnace - Tempress LPCVD - TEOS (7092)

Current status:

AVAILABLE

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Description

Low pressure chemical vapour deposition of silicon oxide from TEOS precursor.

Details

Tool name:

Furnace - Tempress LPCVD - TEOS

Area/room:

Processlab 1

Category:

Thermal processing

Manufacturer:

Tempress

Model:

TS6603RH-BM Series V

Tool rate:

Price/hour:

Low: 580 SEK
Medium: 1070 SEK
High: 1350 SEK

Tool Modes

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