Picture of Surface profiler - Tencor AS500 #1
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Surface profiler with a 2.5 micron wide stylus tip with fixed stylus force.

Max. allowed trench depth:  100 micron

Stylus cone angle: 60 deg.

Software leveling and two ranges available.

 

Tool name:
Surface profiler - Tencor AS500 #1
Area/room:
Processlab 1
Category:
Metrology
Manufacturer:
Tencor
Model:
AS500
Tool rate:
B
Price/hour:
Low: 345 SEK
Medium: 630 SEK
High: 750 SEK

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