The Zeiss Sigma 360, EOS Gemini 1, Scanning Electron Microscope is an indispensable tool for inspecting nano-structures down to few nm. The Schottky field emitter offers bright, stable image, and the instrument is very easy to use. Efficiently pumped chamber can be used for wafers up to 6 inch in size. Work-piece movement over full range is actuated by X-Y motors controlled by joystick.

Funded by: Wallenberg

Max sample size: 200 mm

Resolution 0.9nm@15kV, 1.3nm@1kV, 1.9nm@500V ( InLens detector, short WD ), 1.4nm@3kV ( VP mode )

Acc. voltages 0.01kV - 30kV, with 10V steps.

Probe Current: 3pA - 20nA ( 20nA for EDX )

Source: Schottky Field Emission.

Magnification: up to 1Mx.

Detectors: classical E-T SE, InLens SE, retractable VP BSD1, SDD EDX

Possible to be run in VP mode with vacuum 10 - 133Pa.

6-Axes Motorized Super-Eucentric Specimen Stage:

X = 125mm, Y = 125mm, Z = 50mm, Z' = 10mm, T = -10 - 90deg, R = 360 deg