The Zeiss Gemini 560, EOS Gemini 3, Scanning Electron Microscope is an indispensable tool for inspecting nano-structures down to few nm. The Schottky field emitter offers bright, stable image, and the instrument is very easy to use. Efficiently pumped load-lock can be used for wafers up to 6 inch in size. Work-piece movement over full range is actuated by X-Y motors controlled by joystick.

Funded by: Wallenberg.

Max sample size: 200 mm

Resolution 0.5nm@15kV, 0.8nm@1kV, 1nm@500V ( InLens detector, short WD )

Acc. voltages 0.01kV - 30kV with 10V steps.

Probe Current: 3pA - 20nA

Source: Schottky Field Emission.

Magnification: up to 2Mx.

Detectors: classical E-T SE, InLens SE, ESB, BSD1

6-Axes Motorized Super-Eucentric Specimen Stage:

X = 130mm, Y = 130mm, Z = 50mm, Z' = 10mm, T = -4 - 70deg, R = 360 deg