Picture of Spinner - Suss LabSpin6
Current status:
AVAILABLE
Book | Log| 
Show/Collapse all

Responsibles
Files
You must be logged in to view files.
Description

Wet bench with photoresist spinner. Accomodates chip size from 5x5mm up to 6 inches wafer.

Details
Tool name:
Spinner - Suss LabSpin6
Area/room:
Processlab 1
Category:
Lithography
Manufacturer:
Suss Microtech
Model:
-
Tool rate:
A
Price/hour:
Low: 125 SEK
Medium: 250 SEK
High: 370 SEK
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
You must be logged in to view tool modes.