The Sensofar NEOx optical profiler provides fast and repeatable non-contact high resolution 3D surface measurement, from sub-nanometer roughness to millimeter-high steps.

The system can measure 3D surfaces with different methods: PSI, CSI, confocal imaging and Ai Focus Variation.

The system is equipped with different LED light sources (Red -630 nm-; green -530 nm-; blue -460 nm- and white 575 nm; center-)which can be used for color imaging overlay to the 3D profile. Nomarski illumination is also available.
Different objectives (both interferometric and confocal ones) with multiple magnifications are available.

Fully automatised (tip+ tilt +translation) 6inch-wafer-compatible stage, with stage repeatibilty of 1um.

Vertical resolution => PSI = 1nm //   Confocal = 3nm    //    AiFV = 5nm

Off-line advanced software analysis is possible via SensoMap.