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Laminator for SUEX Dry Film Photoresist (518)
Current status:
AVAILABLE
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Description
ADEX™ and SUEX™ (DJ MICROLAMINATES Inc.)
Dry Film Photoresists
are high performance,
i-line sensitive
, photo-imageable epoxy films available as both sheets and rolls. These films are easily applied using low cost laminating equipment, eliminating the waste and inconvenience associated with spin coating. Film thicknesses from 5 μm to 500 μm and aspect ratios > 20:1 are possible with these convenient to use sheets. Sheets are pre-cut to variety of standard substrate and panel sizes and rolls are available in a variety of widths and lengths. A solvent-free manufacturing technique yields exceptional film thickness uniformity and extremely low average surface roughness.
Micro resist technology
GmbH is a distributor of DJ Microlaminates Dry Film Photoresists for MEMS, microfluidics and packaging applications. Visit web page for more information: https://djmicrolaminates.com/
Details
Tool name:
Laminator for SUEX Dry Film Photoresist
Area/room:
Processlab 1
Category:
Lithography
Manufacturer:
GBC
Model:
PRO SERIES 3600
Tool rate:
A
Price/hour:
Low: 125 SEK
Medium: 240 SEK
High: 360 SEK
Process info
Remove glossy PET cover foil ⇒ Laminate using hot roll laminator @ 60-75°C⇒ Post Lamination Bake: 1 min. @ 85 – 95 °C ⇒ Remove hazy PET foil ⇒ Expose: i-line / Broadband ⇒ Develop face down in mr-Dev 600 ⇒ Hard Bake (optional): 125 – 200 °C.
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