Picture of Spinner - Suss RCD8
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RCD8 is a spinner intended for textured structures and for use with thick photoresists as BCB, SU-8, AZ40XT and alike. The spinner is equipped with a gyro cover, which by slower rotations speeds causes less edge bead and a better and more uniform covereage of textures structures. There's neither EBR rinse (Edge Bead Remover) nor backside rinse as options. 

 

 


 

Tool name:
Spinner - Suss RCD8
Area/room:
Processlab 1
Category:
Lithography
Manufacturer:
Suss
Model:
RCD8
Tool rate:
C
Price/hour:
Low: 580 SEK
Medium: 1000 SEK
High: 1250 SEK

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