Picture of Dry etch RIE - Plasma-Therm - Oxygen
Current status:
AVAILABLE
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Description

Plasma system for O2 stripping and cleaning. Available gases: O2

Details
Tool name:
Dry etch RIE - Plasma-Therm - Oxygen
Area/room:
Processlab 1
Category:
Dry etching
Manufacturer:
Plasma Therm
Model:
BatchTop RIE
Tool rate:
C
Price/hour:
Low: 580 SEK
Medium: 1000 SEK
High: 1250 SEK
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