Picture of Evaporator - Plassys
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Computer controlled evaporation tool dedicated for fabrication of quantum devices. It has a high precision tilting/rotating sample holder for shadow evaporation, and oxygen gas inlet for oxidation of tunnel barriers. The source chamber is cryo pumped and separated from the sample chamber by a gate valve. The sample chamber is turbo pumped, and is equipped with an ion gun for sample pre-cleaning and etching. Materials allowed: Al

Funded by: Knut and Alice Wallenbergs foundation.

Tool name:
Evaporator - Plassys
Area/room:
Processlab 1
Category:
Thin film deposition
Manufacturer:
Plassys
Model:
MEB 550 S
Tool rate:
D
Price/hour:
Low: 910 SEK
Medium: 1600 SEK
High: 2000 SEK

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