Picture of PLD - Carbon System
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AVAILABLE
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1141.3 (Carbon): A fully manual PLD (Pulsed Laser Deposition) system designed and built at Chalmers. The system is dedicated to deposition of diamond-like films (DLC) from a pyrolytic graphite target. The base pressure of the turbo pumped system is <5*10E-7 mbar, the sample size up to 1 inch. Both target and substrate are rotating. 

Tool name:
PLD - Carbon System
Area/room:
Processlab 2
Category:
Thin film deposition
Manufacturer:
Chalmers
Model:
-
Tool rate:
C
Price/hour:
Low: 580 SEK
Medium: 1000 SEK
High: 1250 SEK

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