Picture of Ozone Cleaning - Novascan
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AVAILABLE
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Description

Removes organic surface contamination.

 

Workpiece size: Up to 4-inch wafers
Heater temperature: RT and up to 150C
Allowed materials: Any

 

Details
Tool name:
Ozone Cleaning - Novascan
Area/room:
Processlab 1
Category:
Sample prep
Manufacturer:
Novascan
Model:
PSD-UVT
Tool rate:
B
Price/hour:
Low: 345 SEK
Medium: 630 SEK
High: 750 SEK
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