Picture of PLD - Calas System
Current status:
AVAILABLE
Book | Log
Show/Collapse all

You must be logged in to view files.

1141.1 (CALAS): A computer controlled PLD (Pulsed Laser Deposition) equipment designed and built at Chalmers. The system is equipped with an advanced target revolver for up to six targets, and is mainly used for deposition of high Tc superconductors and related materials. The base pressure of the turbo pumped system is <5*10E-7 mbar, and the sample size is normally 5*5 mm.

Tool name:
PLD - Calas System
Area/room:
Processlab 2
Category:
Thin film deposition
Manufacturer:
Chalmers/Staffan Pehrson
Model:
Generation III
Tool rate:
C
Price/hour:
Low: 580 SEK
Medium: 1000 SEK
High: 1250 SEK

Instructors

Licensed Users

You must be logged in to view tool modes.