Picture of PLD - Small System
Current status:
AVAILABLE
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1140.1 (Small): No longer a PLD system. Only used for vacuum heat treatment of small samples (up to around 30 mm diameter). The system is also equipped with a UV lamp for ozone generation.

Tool name:
PLD - Small System
Area/room:
Processlab 2
Category:
Thin film deposition
Manufacturer:
Chalmers/Staffan Pehrson
Model:
Generation I
Tool rate:
B
Price/hour:
Low: 345 SEK
Medium: 630 SEK
High: 750 SEK

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