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Mask aligner - Canon PPC-210 (1117)
Current status:
AVAILABLE
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Description
Projection print aligner, i-line UV photolithography
Workpiece size:
Up to 2-inch wafers
Materials allowed:
Any
Reduction ratio:
1:1
mask size:
2 inch
intensity:
5mW/sqcm
Details
Tool name:
Mask aligner - Canon PPC-210
Area/room:
Processlab 2
Category:
Lithography
Manufacturer:
Canon
Model:
PPC-210
Tool rate:
C
Price/hour:
Low: 580 SEK
Medium: 1000 SEK
High: 1250 SEK
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