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Furnace - Centrotherm #4-4 LPCVD - Polysilicon (7084)

Current status:

AVAILABLE

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Description

Low pressure chemical vapour deposition of polysilicon or amorphous silicon from silane (SiH4).

Details

Tool name:

Furnace - Centrotherm #4-4 LPCVD - Polysilicon

Area/room:

Processlab 1

Category:

Thermal processing

Manufacturer:

Centrotherm

Model:

LP-Polysilicon

Tool rate:

Price/hour:

Low: 580 SEK
Medium: 1000 SEK
High: 1250 SEK

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