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Furnace - Centrotherm #1-2 Wet & dry oxidation (public) (7072)
Current status:
AVAILABLE
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Description
For wet or dry oxidation of bare silicon (no other materials allowed!).
Details
Tool name:
Furnace - Centrotherm #1-2 Wet & dry oxidation (public)
Area/room:
Processlab 1
Category:
Thermal processing
Manufacturer:
Centrotherm
Model:
Wet oxidation
Tool rate:
B
Price/hour:
Low: 345 SEK
Medium: 630 SEK
High: 750 SEK
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