Placement: Metrology SEM/AFM room
The JEOL JSM-6301F Scanning Electron Microscope is an indespensible tool for inspecting nanostructures down to 20 nm and below. The cold field emitter is giving an instantanious image, and the instrument is very easy to use. The loadlock can be used for wafers up to 100 mm in size. Workpece movement (25 x 35 mm range) is actuated by X-Y motors and a joystick.
Funded by: Wallenberg.
Max sample size: 100 mm
Resolution 1.2 nm@30kV, 7nm@1kV specified
Acc. voltages 0.5kV - 30kV
Source: Cold Field Emission.
Upgraded to RemX PC control july 2011.