Picture of RTP - JIPELEC JetFirst 200
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Tool #437  Rapid Thermal Processor (RTP) JIPELEC Jet First 200

The JIPELEC Jet First 200 is a PC controlled halogen lamp furnace. It accommodates 200mm wafers or smaller wafers placed on a carrier wafer.

Specifications:

Process gas:
Ar or N2

Wafer size:
up to 200mm

Max temperature:
1000°C

Temperature sensor:
Thermocouple or Pyrometer

Allowed substrates:
Sapphire, SiC, GaN, Si, Quartz

Tool name:
RTP - JIPELEC JetFirst 200
Area/room:
Processlab 1
Category:
Thermal processing
Manufacturer:
JIPELEC
Model:
JetFirst 200
Max booking time, day:
6 hours
Max booking time, night:
8 hours
No. of future bookings:
5

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