Tool #410  Rapid Thermal Annealer  (RTA) Opto

The RTA Opto is a manually controlled annealing furnace for small wafers. The wafers are placed on a graphite plate and heated from below by a tungsten filament.

Specifications:

Process gas:
H2/Ar 10/90%

Wafer size:
small pieces < 50mm

Max allowed temperature:
500°C

Heating rate:
20°C -500°C takes 130 seconds @100A heater current