Picture of Evaporator - Bell jar
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Description

Tool #408 Evaporator Opto The Evaporator Opto is a manual deposition tool, equipped with 3 sources for resistive evaporation. It is typically used for deposition of ohmic contacts on components. Specifications: Base pressure:

  ~ 1x10-6 mbar

Wafer size:

  Small pieces clamped to a 4x4cm2 sample holder.

Materials:

  Au, Ag, Cr, Au/Ge
Details
Tool name:
Evaporator - Bell jar
Area/room:
Processlab 1
Category:
Thin film deposition
Manufacturer:
Chalmers
Model:
Eva
Tool rate:
C
Price/hour:
Low: 580 SEK
Medium: 1000 SEK
High: 1250 SEK
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