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Description

RTP tool for rapid thermal processing.

Funded by: Knut and Alice Wallenbergs foundation.

Details
Tool name:
RTP - STEAG
Area/room:
Processlab 1
Category:
Thermal processing
Manufacturer:
Steag
Model:
SHS 100M
Tool rate:
C
Price/hour:
Low: 580 SEK
Medium: 1000 SEK
High: 1250 SEK
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