Picture of RTP - STEAG
Current status:
AVAILABLE
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RTP tool for rapid thermal processing.

Funded by: Knut and Alice Wallenbergs foundation.

Tool name:
RTP - STEAG
Area/room:
Processlab 1
Category:
Thermal processing
Manufacturer:
Steag
Model:
SHS 100M
Max booking time, day:
4 hours
Max booking time, night:
4 hours
No. of future bookings:
5

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