Picture of Ellipsometer - Sagax Isoscope
Current status:
AVAILABLE
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Different references for oxide, nitride and photo resist are available.

Measurement precision: Approx. +/- 50Å on a 10.000Å thickness.

NB! No new licenses will be issued for this tool. Please apply instead for the Woollam ellipsometer, tool #112.

Tool name:
Ellipsometer - Sagax Isoscope
Area/room:
Processlab 1
Category:
Metrology
Manufacturer:
Sagax
Model:
Isoscope
Max booking time, day:
4 hours
Max booking time, night:
4 hours
No. of future bookings:
5

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