The Zeiss Supra 55VP Scanning Electron Microscope is an indispensable tool for inspecting nano-structures
down to few nm. The Schottky field emitter offers bright, stable image, and the instrument is very easy to use.
Efficiently pumped chamber can be used for wafers up to 6 inch in size. Work-piece movement over full range is
actuates by X-Y motors controlled by joystick.
Funded by: Wallenberg
Max sample size: 150mm
Resolution 0.9nm@30kV, 1.7nm@1kV ( InLens detector, short WD ), 2nm@30kV ( VP mode )
Acc. voltages: 0.05kV - 30kV
Probe current: 4pA - 10nA ( 20nA for EDX )
Source: Schottky Field Emission