Picture of SEM - Zeiss Supra 55 - EDX
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The Zeiss Supra 55VP Scanning  Electron Microscope is an indispensable tool for inspecting nano-structures

down to few nm. The Schottky field emitter offers bright, stable image, and the instrument is very easy to use.

Efficiently pumped chamber can be used for wafers up to 6 inch in size. Work-piece movement over full range is

actuates by X-Y motors controlled by joystick.

 

Funded by: Wallenberg

Max sample size: 150mm

Resolution 0.9nm@30kV, 1.7nm@1kV ( InLens detector, short WD ), 2nm@30kV ( VP mode )

Acc. voltages: 0.05kV - 30kV

Probe current: 4pA - 10nA ( 20nA for EDX )

Source: Schottky Field Emission

Tool name:
SEM - Zeiss Supra 55 - EDX
Area/room:
Processlab 1
Category:
Metrology
Manufacturer:
Zeiss
Model:
Supra 55 VP
Max booking time, day:
3 hours
Max booking time, night:
6 hours
No. of future bookings:
6

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