Picture of Spinner - Suss LabSpin6
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Photo resist spinner for small pieces and wafers rangeing from 2" to 6".
The spinner is intended for conventional (solvable in acetone) photo resists ONLY.

Spin speed: 100 to 8000 RPM

Software: 200 recipes, 40 steps each

 

Tool name:
Spinner - Suss LabSpin6
Area/room:
Processlab 1
Category:
Lithography
Manufacturer:
Suss
Model:
LabSpin
Max booking time, day:
3 hours
Max booking time, night:
3 hours
No. of future bookings:
3

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