Picture of Stepper - ASML PAS 2500
Current status:
AVAILABLE
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Description

Stepper for 2,3,4 and 6 inch wafers, dedicated for the microwave- and opto-process lines.

Details
Tool name:
Stepper - ASML PAS 2500
Area/room:
Processlab 1
Category:
Lithography
Manufacturer:
ASML
Model:
PAS 2500
Tool rate:
D
Price/hour:
Low: 910 SEK
Medium: 1600 SEK
High: 2000 SEK
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