Picture of PLD - Compex Pro 110 Laser
Current status:
AVAILABLE
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In April 2016, the old Lambda-Physik Compex 110 excimer laser was replaced with a Coherent Compex Pro 100 fitted with unstable resonator optics. It operates with KrF chemistry, wavelength 248 nm, maximum pulse energy is 290 mJ and max repetition rate 50 Hz. Used for pulsed laser deposition (PLD) in tools #11401 and #11402.

Tool name:
PLD - Compex Pro 110 Laser
Area/room:
Processlab 2
Category:
Thin film deposition
Manufacturer:
Lambda-Physik
Model:
Compex 110
Max booking time, day:
24 hours
Max booking time, night:
24 hours
No. of future bookings:
5

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