In April 2016, the old Lambda-Physik Compex 110 excimer laser was replaced with a Coherent Compex Pro 100 fitted with unstable resonator optics. It operates with KrF chemistry, wavelength 248 nm, maximum pulse energy is 290 mJ and max repetition rate 50 Hz. Used for pulsed laser deposition (PLD) in tools #11401 and #11402.