Picture of PLD - Compex Pro 110 Laser
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In April 2016, the old Lambda-Physik Compex 110 excimer laser was replaced with a Coherent Compex Pro 100 fitted with unstable resonator optics. It operates with KrF chemistry, wavelength 248 nm, maximum pulse energy is 290 mJ and max repetition rate 50 Hz. Used for pulsed laser deposition (PLD) in tools #11401 and #11402.

Tool name:
PLD - Compex Pro 110 Laser
Area/room:
Processlab 2
Category:
Thin film deposition
Manufacturer:
Lambda-Physik
Model:
Compex 110
Tool rate:
C
Price/hour:
Low: 580 SEK
Medium: 1000 SEK
High: 1250 SEK

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