Philips X'Pert Materials Research Diffractometer (MRD)

Location: room D314

Description: A 4-circle diffractometer with various pre-aligned fast interchangable x-ray (PREFIX) optical modules for point- and line-focus applications. The X-ray tube with Cu anode gives K-alpha radiation and is typically operated at 40kV (high-tension) and at 40mA (tube current). The open Eulerian geometry MRD cradle accepts wafers up to 4".

Available PREFIX modules (Primary side): # Crossed slits collimator # Fixed divergence slit with attentuator # X-ray lens # Symmetrical Ge[440] 4-crystal monochromator # X-ray mirror Available PREFIX modules (Secondary side): # Triple axis(Ge[220])/Rocking curve attachment # Parallel beam collimator with flat graphite monochromator # Programmable receiving slit